Analysis of high resistivity semiconductor specimens in an energy-compensated time-of-flight atom probe

A. J. Melmed, M. Martinka, S. M. Girvin, T. Sakurai, Y. Kuk

    Research output: Contribution to journalArticlepeer-review

    22 Citations (Scopus)

    Abstract

    It is shown that high resistivity semiconductor specimens (at least up to 8.6×103, and probably up to 2.4×104 Ω cm) can be analyzed in a conventional energy-compensated time-of-flight atom probe by using pulses of longer than usual duration and that the necessary pulse width increases with specimen resistance.

    Original languageEnglish
    Pages (from-to)416-417
    Number of pages2
    JournalApplied Physics Letters
    Volume39
    Issue number5
    DOIs
    Publication statusPublished - 1981

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

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