Analysis of hard spring effect of tense poly-Si torsion bar of micromirror

Subrata Kumar Kundu, Shouhei Ogawa, Shinya Kumagai, Masayuki Fujishima, Kazuhiro Hane, Minoru Sasaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.

Original languageEnglish
Title of host publication2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages162-163
Number of pages2
DOIs
Publication statusPublished - 2012 Nov 22
Event2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada
Duration: 2012 Aug 62012 Aug 9

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
CountryCanada
CityBanff, AB
Period12/8/612/8/9

Keywords

  • Electrostatic Actuation
  • Hard Spring Effect
  • MEMS Devices
  • Micromirror
  • Poly-Si Torsion Bar

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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