Analysis of a comb-drive actuator taking the depletion layer into consideration

Shinji Ueki, Yuki Nishimori, Hiroshi Imamoto, Tomohiro Kubota, Masakazu Sugiyama, Seiji Samukawa, Gen Hashiguchi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

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Engineering & Materials Science