An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings

Lue Quan, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new method using an ultra-sensitive angle sensor to evaluate the grating pitch deviation is proposed in this paper. The principle and theoretical calculation are done to confirm the theoretical feasibility of the new proposed method. Theoretically, with a high resolution optical angle sensor, this method can reach an extremely high resolution of picometers for the evaluation of grating pitch deviation. Compensation methods of angle error during scanning process are also discussed.

Original languageEnglish
Title of host publicationProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
EditorsTeen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages47-48
Number of pages2
ISBN (Electronic)9781538656099
DOIs
Publication statusPublished - 2019 Jan 16
Event2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China
Duration: 2018 Nov 162018 Nov 18

Publication series

NameProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
CountryTaiwan, Province of China
CityYunlin
Period18/11/1618/11/18

Keywords

  • Angle sensor
  • Grating
  • Pitch measurement

ASJC Scopus subject areas

  • Biomedical Engineering
  • Mechanics of Materials
  • Safety, Risk, Reliability and Quality
  • Management, Monitoring, Policy and Law
  • Education
  • Fluid Flow and Transfer Processes
  • Industrial and Manufacturing Engineering

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