An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings

Lue Quan; Hiraku Matsukuma; Xiuguo Chen; Yuki Shimizu; Wei Gao

doi:10.1109/AMCON.2018.8614962

An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings

Lue Quan, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A new method using an ultra-sensitive angle sensor to evaluate the grating pitch deviation is proposed in this paper. The principle and theoretical calculation are done to confirm the theoretical feasibility of the new proposed method. Theoretically, with a high resolution optical angle sensor, this method can reach an extremely high resolution of picometers for the evaluation of grating pitch deviation. Compensation methods of angle error during scanning process are also discussed.

Original language	English
Title of host publication	Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Editors	Teen-Hang Meen
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	47-48
Number of pages	2
ISBN (Electronic)	9781538656099
DOIs	https://doi.org/10.1109/AMCON.2018.8614962
Publication status	Published - 2019 Jan 16
Event	2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China Duration: 2018 Nov 16 → 2018 Nov 18

Publication series

Name	Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference	2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
Country/Territory	Taiwan, Province of China
City	Yunlin
Period	18/11/16 → 18/11/18

Keywords

Angle sensor
Grating
Pitch measurement

ASJC Scopus subject areas

Biomedical Engineering
Mechanics of Materials
Safety, Risk, Reliability and Quality
Management, Monitoring, Policy and Law
Education
Fluid Flow and Transfer Processes
Industrial and Manufacturing Engineering

Access to Document

10.1109/AMCON.2018.8614962

Cite this

Quan, L., Matsukuma, H., Chen, X., Shimizu, Y., & Gao, W. (2019). An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings. In T-H. Meen (Ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 (pp. 47-48). [8614962] (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AMCON.2018.8614962

An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings. / Quan, Lue; Matsukuma, Hiraku; Chen, Xiuguo; Shimizu, Yuki ; Gao, Wei.

Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. ed. / Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2019. p. 47-48 8614962 (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Quan, L, Matsukuma, H, Chen, X, Shimizu, Y & Gao, W 2019, An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings. in T-H Meen (ed.), Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018., 8614962, Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, Institute of Electrical and Electronics Engineers Inc., pp. 47-48, 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, Yunlin, Taiwan, Province of China, 18/11/16. https://doi.org/10.1109/AMCON.2018.8614962

Quan L, Matsukuma H, Chen X, Shimizu Y , Gao W. An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings. In Meen T-H, editor, Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. Institute of Electrical and Electronics Engineers Inc. 2019. p. 47-48. 8614962. (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018). https://doi.org/10.1109/AMCON.2018.8614962

Quan, Lue ; Matsukuma, Hiraku ; Chen, Xiuguo ; Shimizu, Yuki ; Gao, Wei. / An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings. Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018. editor / Teen-Hang Meen. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 47-48 (Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018).

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title = "An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings",

abstract = "A new method using an ultra-sensitive angle sensor to evaluate the grating pitch deviation is proposed in this paper. The principle and theoretical calculation are done to confirm the theoretical feasibility of the new proposed method. Theoretically, with a high resolution optical angle sensor, this method can reach an extremely high resolution of picometers for the evaluation of grating pitch deviation. Compensation methods of angle error during scanning process are also discussed.",

keywords = "Angle sensor, Grating, Pitch measurement",

author = "Lue Quan and Hiraku Matsukuma and Xiuguo Chen and Yuki Shimizu and Wei Gao",

note = "Funding Information: This research was supported by Japan Society for the Promotion of Science (JSPS). Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 ; Conference date: 16-11-2018 Through 18-11-2018",

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An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings

Abstract

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Keywords

ASJC Scopus subject areas

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