An ultra-precision scanning tunneling microscope Z-scanner for surface profile measurement of large amplitude micro-structures

Shigeaki Goto, Keiichiro Hosobuchi, I Ko

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

This paper presents an ultra-precision STM Z-scanner for surface profile measurement of micro-structures with large amplitudes on the order of several tens of micrometers. The Z-scanner consists of an STM probe, a long stroke PZT actuator with a full stroke of 70 νm, and a linear encoder. The linear encoder is employed to accurately measure a Z-directional displacement of a STM probe tracking a sample surface. The linear encoder yields a least significant bit resolution of 0.5 nm over the full stroke of the actuator. The peak-to-valley value of the Z-scanner nonlinearity is smaller than 10 nm over an effective measurement range of 50 νm. Experiments of surface profile measurement of samples with micro-structures were carried out by combining the Z-scanner and an X-directional PZT scanning stage, on which the sample is mounted. The feasibility of the developed ultra-precision Z-scanner has been confirmed from the measurement results.

Original languageEnglish
Article number085101
JournalMeasurement Science and Technology
Volume22
Issue number8
DOIs
Publication statusPublished - 2011 Jan 1

Keywords

  • AFM
  • SPM
  • STM
  • Z-scanner
  • displacement
  • error compensation
  • linear encoder
  • micro-structure
  • surface form

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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