An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

M. Fujiyoshi, Y. Nonomura, H. Funabashi, Y. Omura, T. Akashi, Y. Hata, H. Yamada, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

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Engineering & Materials Science