An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection

M. Fujiyoshi, Y. Nonomura, H. Funabashi, Y. Omura, T. Akashi, Y. Hata, H. Yamada, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Citations (Scopus)

Abstract

We have developed a fully-differential 3-axis accelerometer with a novel zigzag-shaped Z-electrode, which is used for motion controls of automobiles and robots.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1010-1013
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • 3-axis
  • SOI
  • accelerometer
  • differential detection

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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