An orientation ratio and ferroelectric properties of ultra-thin PTO films

K. Nishida, T. Sugino, M. Osada, M. Kakihana, T. Katoda

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

The relationship among crystallographic orientation and quality, flatness of a surface, electrical properties and thickness for lead titanate (PbTiO 3 : PTO) ultra-thin films is reported. A crystallographic orientation changed from (100) to (001) with an increase in film thickness. However, a (001) plane orientation ratio α saturated to 0.85 and root square mean (RMS) of flatness saturated to 1.4nm when the film thickness was approximately 90nm. A PTO film thinner than approximately 90nm had a larger dielectric constant and that thicker than approximate 90nm showed ferroelectric property.

Original languageEnglish
Pages (from-to)312-317
Number of pages6
JournalApplied Surface Science
Volume216
Issue number1-4 SPEC.
DOIs
Publication statusPublished - 2003 Jun 30
Externally publishedYes

Keywords

  • Ferroelectrics
  • Film orientation
  • P-E property
  • PTO
  • Substrate

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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