Abstract
The relationship among crystallographic orientation and quality, flatness of a surface, electrical properties and thickness for lead titanate (PbTiO 3 : PTO) ultra-thin films is reported. A crystallographic orientation changed from (100) to (001) with an increase in film thickness. However, a (001) plane orientation ratio α saturated to 0.85 and root square mean (RMS) of flatness saturated to 1.4nm when the film thickness was approximately 90nm. A PTO film thinner than approximately 90nm had a larger dielectric constant and that thicker than approximate 90nm showed ferroelectric property.
Original language | English |
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Pages (from-to) | 312-317 |
Number of pages | 6 |
Journal | Applied Surface Science |
Volume | 216 |
Issue number | 1-4 SPEC. |
DOIs | |
Publication status | Published - 2003 Jun 30 |
Externally published | Yes |
Keywords
- Ferroelectrics
- Film orientation
- P-E property
- PTO
- Substrate
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films