An optical sensor for measurement of angular motions of a planar motion stage

Hiroshi Muto; Tetsuo Sugeno; Yusuke Saito; Yoshikazu Arai; I Ko

An optical sensor for measurement of angular motions of a planar motion stage

Hiroshi Muto, Tetsuo Sugeno, Yusuke Saito, Yoshikazu Arai, I Ko

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper describes an optical sensor for measurement of angular motions of a planar motion stage. The sensor has the advantages of small dimension, high resolution and the ability to measure 3-axis angular motions by using only one scale grating. The sensor consists of a laser diode (LD) as the light source, a photodiodes (PD) as the position-sensing detector, and a diffractive grating as the target mirror, which is fixed on the moving part of the stage. The angular motions of the planar motion stage (yawing, rolling, and pitching) are detected based on the fact that the diffraction beams (0^th-order and -1 ^st-order) from the grating tilt about the three-axes (X, Y, and Z) with respect to the angular motions.

Original language	English
Title of host publication	10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
Pages	37-40
Number of pages	4
Publication status	Published - 2010 Dec 1
Event	10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 - Osaka, Japan Duration: 2010 Sep 5 → 2010 Sep 9

Other

Other	10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
Country/Territory	Japan
City	Osaka
Period	10/9/5 → 10/9/9

Keywords

3-axis angle sensor
Laser autocollimation
Planar motion stage

ASJC Scopus subject areas

Safety, Risk, Reliability and Quality

Cite this

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title = "An optical sensor for measurement of angular motions of a planar motion stage",

abstract = "This paper describes an optical sensor for measurement of angular motions of a planar motion stage. The sensor has the advantages of small dimension, high resolution and the ability to measure 3-axis angular motions by using only one scale grating. The sensor consists of a laser diode (LD) as the light source, a photodiodes (PD) as the position-sensing detector, and a diffractive grating as the target mirror, which is fixed on the moving part of the stage. The angular motions of the planar motion stage (yawing, rolling, and pitching) are detected based on the fact that the diffraction beams (0th-order and -1 st-order) from the grating tilt about the three-axes (X, Y, and Z) with respect to the angular motions.",

keywords = "3-axis angle sensor, Laser autocollimation, Planar motion stage",

author = "Hiroshi Muto and Tetsuo Sugeno and Yusuke Saito and Yoshikazu Arai and I Ko",

year = "2010",

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day = "1",

language = "English",

isbn = "9781617820199",

pages = "37--40",

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note = "10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 ; Conference date: 05-09-2010 Through 09-09-2010",

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TY - GEN

T1 - An optical sensor for measurement of angular motions of a planar motion stage

AU - Muto, Hiroshi

AU - Sugeno, Tetsuo

AU - Saito, Yusuke

AU - Arai, Yoshikazu

AU - Ko, I

PY - 2010/12/1

Y1 - 2010/12/1

N2 - This paper describes an optical sensor for measurement of angular motions of a planar motion stage. The sensor has the advantages of small dimension, high resolution and the ability to measure 3-axis angular motions by using only one scale grating. The sensor consists of a laser diode (LD) as the light source, a photodiodes (PD) as the position-sensing detector, and a diffractive grating as the target mirror, which is fixed on the moving part of the stage. The angular motions of the planar motion stage (yawing, rolling, and pitching) are detected based on the fact that the diffraction beams (0th-order and -1 st-order) from the grating tilt about the three-axes (X, Y, and Z) with respect to the angular motions.

AB - This paper describes an optical sensor for measurement of angular motions of a planar motion stage. The sensor has the advantages of small dimension, high resolution and the ability to measure 3-axis angular motions by using only one scale grating. The sensor consists of a laser diode (LD) as the light source, a photodiodes (PD) as the position-sensing detector, and a diffractive grating as the target mirror, which is fixed on the moving part of the stage. The angular motions of the planar motion stage (yawing, rolling, and pitching) are detected based on the fact that the diffraction beams (0th-order and -1 st-order) from the grating tilt about the three-axes (X, Y, and Z) with respect to the angular motions.

KW - 3-axis angle sensor

KW - Laser autocollimation

KW - Planar motion stage

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M3 - Conference contribution

AN - SCOPUS:84871576954

SN - 9781617820199

SP - 37

EP - 40

BT - 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010

T2 - 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010

Y2 - 5 September 2010 through 9 September 2010

ER -

An optical sensor for measurement of angular motions of a planar motion stage

Abstract

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Keywords

ASJC Scopus subject areas

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