An optical sensor for measurement of angular motions of a planar motion stage

Hiroshi Muto, Tetsuo Sugeno, Yusuke Saito, Yoshikazu Arai, I Ko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes an optical sensor for measurement of angular motions of a planar motion stage. The sensor has the advantages of small dimension, high resolution and the ability to measure 3-axis angular motions by using only one scale grating. The sensor consists of a laser diode (LD) as the light source, a photodiodes (PD) as the position-sensing detector, and a diffractive grating as the target mirror, which is fixed on the moving part of the stage. The angular motions of the planar motion stage (yawing, rolling, and pitching) are detected based on the fact that the diffraction beams (0th-order and -1 st-order) from the grating tilt about the three-axes (X, Y, and Z) with respect to the angular motions.

Original languageEnglish
Title of host publication10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
Pages37-40
Number of pages4
Publication statusPublished - 2010 Dec 1
Event10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 - Osaka, Japan
Duration: 2010 Sep 52010 Sep 9

Other

Other10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010
CountryJapan
CityOsaka
Period10/9/510/9/9

Keywords

  • 3-axis angle sensor
  • Laser autocollimation
  • Planar motion stage

ASJC Scopus subject areas

  • Safety, Risk, Reliability and Quality

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