Abstract
This paper describes an optical sensor for measurement of angular motions of a planar motion stage. The sensor has the advantages of small dimension, high resolution and the ability to measure 3-axis angular motions by using only one scale grating. The sensor consists of a laser diode (LD) as the light source, a photodiodes (PD) as the position-sensing detector, and a diffractive grating as the target mirror, which is fixed on the moving part of the stage. The angular motions of the planar motion stage (yawing, rolling, and pitching) are detected based on the fact that the diffraction beams (0th-order and -1 st-order) from the grating tilt about the three-axes (X, Y, and Z) with respect to the angular motions.
Original language | English |
---|---|
Title of host publication | 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 |
Pages | 37-40 |
Number of pages | 4 |
Publication status | Published - 2010 Dec 1 |
Event | 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 - Osaka, Japan Duration: 2010 Sep 5 → 2010 Sep 9 |
Other
Other | 10th International Symposium on Measurement and Quality Control 2010, ISMQC 2010 |
---|---|
Country/Territory | Japan |
City | Osaka |
Period | 10/9/5 → 10/9/9 |
Keywords
- 3-axis angle sensor
- Laser autocollimation
- Planar motion stage
ASJC Scopus subject areas
- Safety, Risk, Reliability and Quality