An Instrument for three-dimensional edge profile measurement of micro-cutting tools

T. Asai, Y. Arai, Y. Cui, I Ko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes an atomic force microscope (AFM) based instrument for measuring three-dimensional (3D) edge profiles of single point micro-cutting tools. The instrument consists of an AFM unit for profile measurement and an optical sensor for aligning the AFM probe-tip with the top of the tool's edge. In the optical sensor, a laser beam is emitted from a laser diode and focused to a small beam spot with a diameter of approximately 10 μm at the beam waist. The beam is then received by a photodiode. The top of the tool edge and the probe-tip is positioned about the beam center of the beam waist through monitoring the variation in the photodiode output. Servo motor-driven stages controlled by a personal computer are employed to move the AFM unit and the tool for high-speed and automatic alignment. Edge profile measurement of a round nose diamond cutting tool with a nose radius of 8 μm is carried out to verify the performance of the instrument.

Original languageEnglish
Title of host publicationProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
EditorsHendrik Van Brussel, H. Spaan, E. Brinksmeier, T. Burke
Publishereuspen
Pages310-314
Number of pages5
ISBN (Electronic)9780955308253
Publication statusPublished - 2008 Jan 1
Event10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 - Zurich, Switzerland
Duration: 2008 May 182008 May 22

Publication series

NameProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Volume1

Other

Other10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
CountrySwitzerland
CityZurich
Period08/5/1808/5/22

ASJC Scopus subject areas

  • Instrumentation
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Industrial and Manufacturing Engineering

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