An infrared imaging method for high-throughput combinatorial investigation of hydrogenation-dehydrogenation and new phase formation of thin films

H. Oguchi, J. Hattrick-Simpers, I. Takeuchi, E. J. Heilweil, L. A. Bendersky

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

We have developed an infrared imaging setup enabling in situ infrared images to be acquired, and expanded on capabilities of an infrared imaging as a high-throughput screening technique, determination of a critical thickness of a Pd capping layer which significantly blocks infrared emission from below, enhancement of sensitivity to hydrogenation and dehydrogenation by normalizing raw infrared intensity of a Mg thin film to an inert reference, rapid and systematic screening of hydrogenation and dehydrogenation properties of a Mg-Ni composition spread covered by a thickness gradient Pd capping layer, and detection of formation of a Mg2 Si phase in a Mg thin film on a thermally oxidized Si substrate during annealing.

Original languageEnglish
Article number073707
JournalReview of Scientific Instruments
Volume80
Issue number7
DOIs
Publication statusPublished - 2009

ASJC Scopus subject areas

  • Instrumentation

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