This paper discusses the accuracy of the impedance measurement for thin film inductors over l0MHz range. It is necessary for accurate measurement to prepare an appropriate fixture. A fixture having precise dimensions permits impedance matching between the inductor and the measurement instrument. We developed an improved system to measure the impedance of thin film inductors accurately up to 500MHz.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering