An Improved Technique of Impedance Measurement for Thin Film Inductors Over l0MHz

K. I. Arai, M. Yamaguchi, H. Ohzeki

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

This paper discusses the accuracy of the impedance measurement for thin film inductors over l0MHz range. It is necessary for accurate measurement to prepare an appropriate fixture. A fixture having precise dimensions permits impedance matching between the inductor and the measurement instrument. We developed an improved system to measure the impedance of thin film inductors accurately up to 500MHz.

Original languageEnglish
Pages (from-to)2175-2177
Number of pages3
JournalIEEE Transactions on Magnetics
Volume28
Issue number5
DOIs
Publication statusPublished - 1992 Sep

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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