An extended auto-collimation method combined with a deflect optical system for non-contact profile measurement

Hiroki Shimizu, Yoji Watanabe, Wei Gao, Satoshi Kiyono

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

A new laser auto-collimation method combining an optical system to deflect rays is proposed. This method expands the measuring range of auto-collimation method to hundreds of times and enables the profile measurement of fine finished curved surface like lenses, mirrors and molds. Experimental system is constructed and it is confirmed that profile error of concave mirror can be measured by the proposed method with a repeatability of 20nm.

Original languageEnglish
Pages249-252
Number of pages4
Publication statusPublished - 2005
Event5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France
Duration: 2005 May 82005 May 11

Other

Other5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005
CountryFrance
CityMontpellier
Period05/5/805/5/11

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Instrumentation

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  • Cite this

    Shimizu, H., Watanabe, Y., Gao, W., & Kiyono, S. (2005). An extended auto-collimation method combined with a deflect optical system for non-contact profile measurement. 249-252. Paper presented at 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005, Montpellier, France.