Abstract
We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3× 107 electrons/pixel was successfully reconstructed.
Original language | English |
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Article number | 033707 |
Journal | Review of Scientific Instruments |
Volume | 81 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2010 Apr 14 |
Externally published | Yes |
ASJC Scopus subject areas
- Instrumentation