An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy

Yukio Takahashi, Hideto Kubo, Yoshinori Nishino, Hayato Furukawa, Ryosuke Tsutsumi, Kazuto Yamauchi, Tetsuya Ishikawa, Eiichiro Matsubara

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3× 107 electrons/pixel was successfully reconstructed.

Original languageEnglish
Article number033707
JournalReview of Scientific Instruments
Volume81
Issue number3
DOIs
Publication statusPublished - 2010 Apr 14
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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