An electrostatic servo-type three-axis silicon accelerometer

Keiji Jono, Kazuyuki Minami, Masayoshi Esashi

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

A three-axis capacitive accelerometer using an electrostatic servo system was developed. In this system, the acceleration is decomposed into its axial components independently and simultaneously by using synchronous demodulation. To reduce the off-axis response, an electrostatic force-balancing principle was used in order to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.

Original languageEnglish
Article number003
Pages (from-to)11-15
Number of pages5
JournalMeasurement Science and Technology
Volume6
Issue number1
DOIs
Publication statusPublished - 1995 Dec 1

ASJC Scopus subject areas

  • Instrumentation
  • Applied Mathematics

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