An electrostatic servo-type three-axis silicon accelerometer

Keiji Jono; Kazuyuki Minami; Masayoshi Esashi

doi:10.1088/0957-0233/6/1/003

An electrostatic servo-type three-axis silicon accelerometer

Keiji Jono, Kazuyuki Minami, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

A three-axis capacitive accelerometer using an electrostatic servo system was developed. In this system, the acceleration is decomposed into its axial components independently and simultaneously by using synchronous demodulation. To reduce the off-axis response, an electrostatic force-balancing principle was used in order to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.

Original language	English
Article number	003
Pages (from-to)	11-15
Number of pages	5
Journal	Measurement Science and Technology
Volume	6
Issue number	1
DOIs	https://doi.org/10.1088/0957-0233/6/1/003
Publication status	Published - 1995 Dec 1

ASJC Scopus subject areas

Instrumentation
Applied Mathematics

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10.1088/0957-0233/6/1/003

Cite this

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abstract = "A three-axis capacitive accelerometer using an electrostatic servo system was developed. In this system, the acceleration is decomposed into its axial components independently and simultaneously by using synchronous demodulation. To reduce the off-axis response, an electrostatic force-balancing principle was used in order to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.",

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An electrostatic servo-type three-axis silicon accelerometer

Abstract

ASJC Scopus subject areas

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