An electrostatic servo-type three-axis silicon accelerometer

Keiji Jono, Kazuyuki Minami, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)


A three-axis capacitive accelerometer using an electrostatic servo system was developed. In this system, the acceleration is decomposed into its axial components independently and simultaneously by using synchronous demodulation. To reduce the off-axis response, an electrostatic force-balancing principle was used in order to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%.

Original languageEnglish
Article number003
Pages (from-to)11-15
Number of pages5
JournalMeasurement Science and Technology
Issue number1
Publication statusPublished - 1995 Dec 1

ASJC Scopus subject areas

  • Instrumentation
  • Applied Mathematics


Dive into the research topics of 'An electrostatic servo-type three-axis silicon accelerometer'. Together they form a unique fingerprint.

Cite this