An Electrostatic Servo Capacitive Pressure Sensor

Yuzuru Ueda, Hiroshi Henmi, Kazuyuki Minami, Masayoshi Esashi

Research output: Contribution to journalArticle

Abstract

We have fabricated an electrostatic servo capacitive pressure sensor by using bulk silicon micromachining and SODIC(SOot-Deposited Integrated Circuit) wafer. The sensor consists of fixed electrodes and two diaphragms which are connected with pillars to move together for electrostatic servo force balancing. It detects pressure by the servo-voltage which is supplied between the lower diaphragm and the fixed electrodes to keep the diaphragm at the initial position. The diaphragm position is detected by the capacitance change between the upper diaphragm and the fixed electrodes. The capacitances versus pressure and the servo-voltage are measured. The results of these measurements show that this sensor can detect the pressure by the servo-voltage and have high sensitivity and wide dynamic range in comparison with the open-loop sensors. The sensor has an advantage that it is not affected by dusts or particles because the capacitor gap is isolated from the external environments.

Original languageEnglish
Pages (from-to)94-98
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Volume119
Issue number2
DOIs
Publication statusPublished - 1999 Jan 1

Keywords

  • Pressure Sensor
  • SODIC Wafer
  • Servo

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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