An Electrostatic Servo-Accelerometer with mG Resolution

Ko Sangchoon, Dongyoun Sim, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

An electrostatic servo silicon accelerometer with mG resolution for measurment of the seismic movement was developed. The sensor is composed of a glass-silicon-glass structure by using bulk silicon micromaching techniques. It has a mass and four suspending beams. The working range of the sensor is ± 1G and operating frequency bandwidth is 1kHz. The resolution is 1.6mG. To achieve high sensitivity thin beams are required for springs and shield electrodes are formed on the glass to prevent an electrostatic bonding of the beam to the glass.

Original languageEnglish
Pages (from-to)368-373
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Volume119
Issue number7
DOIs
Publication statusPublished - 1999

Keywords

  • Accelerometer
  • Anodic Bonding
  • Seismometer
  • Sensor Packaging

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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