An ECR-sputtered ZnO epitaxial film and its characteristics

M. Minakata, M. Kadota

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Number of pages1
JournalIntegrated Ferroelectrics
Volume20
Issue number1-4
DOIs
Publication statusPublished - 1998 Jan 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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