An application possibility of self-ordered mesoporous silicate for surface photo voltage (SPV) type NO gas sensor (II): Self-ordered mesoporous silicate incorporated SPV device and its sensing property dependence on mesostructure

Takeo Yamada, Hao Shen Zhou, Hidekazu Uchida, Masato Tomita, Yuko Ueno, Keisuke Asai, Itaru Honma, Teruaki Katsube

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Self-ordered mesoporous silicate films from organic-inorganic compound materials are successfully fabricated into the surface photo voltage (SPV) type gas sensor device as a gas adsorption insulator layer. These kinds of gas sensors device exhibit NO gas sensing property dependent on their mesoporous film structure. We are succeeded in indication about a possibility of mesoporous silicate film for the SPV type gas sensor application.

Original languageEnglish
Pages (from-to)1304-1310
Number of pages7
JournalIEICE Transactions on Electronics
VolumeE85-C
Issue number6
Publication statusPublished - 2002 Jun
Externally publishedYes

Keywords

  • Cubic mesostructure
  • Hexagonal mesostructure
  • NO gas sensor
  • Self-ordered mesoporous silicate film
  • Surface photo voltage

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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