An air-bearing displacement sensor for nanometrology of surface forms

Kang Won Lee; So Ito; Yuki Shimizu; Wei Gao; Katsutoshi Tanaka; Masahiko Fukuta; Yoshiaki Kai

doi:10.1109/I2MTC.2012.6229158

An air-bearing displacement sensor for nanometrology of surface forms

Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.

Original language	English
Title of host publication	2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings
Pages	2469-2471
Number of pages	3
DOIs	https://doi.org/10.1109/I2MTC.2012.6229158
Publication status	Published - 2012
Event	2012 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2012 - Graz, Austria Duration: 2012 May 13 → 2012 May 16

Publication series

Name	2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings

Other

Other	2012 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2012
Country/Territory	Austria
City	Graz
Period	12/5/13 → 12/5/16

Keywords

air-bearing
measurement
micro structures
stylus

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/I2MTC.2012.6229158

Cite this

Lee, K. W., Ito, S., Shimizu, Y., Gao, W., Tanaka, K., Fukuta, M., & Kai, Y. (2012). An air-bearing displacement sensor for nanometrology of surface forms. In 2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings (pp. 2469-2471). [6229158] (2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings). https://doi.org/10.1109/I2MTC.2012.6229158

An air-bearing displacement sensor for nanometrology of surface forms. / Lee, Kang Won; Ito, So; Shimizu, Yuki et al.

2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings. 2012. p. 2469-2471 6229158 (2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lee, KW, Ito, S, Shimizu, Y, Gao, W, Tanaka, K, Fukuta, M & Kai, Y 2012, An air-bearing displacement sensor for nanometrology of surface forms. in 2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings., 6229158, 2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings, pp. 2469-2471, 2012 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2012, Graz, Austria, 12/5/13. https://doi.org/10.1109/I2MTC.2012.6229158

Lee KW, Ito S, Shimizu Y, Gao W, Tanaka K, Fukuta M et al. An air-bearing displacement sensor for nanometrology of surface forms. In 2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings. 2012. p. 2469-2471. 6229158. (2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings). doi: 10.1109/I2MTC.2012.6229158

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abstract = "This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.",

keywords = "air-bearing, measurement, micro structures, stylus",

author = "Lee, {Kang Won} and So Ito and Yuki Shimizu and Wei Gao and Katsutoshi Tanaka and Masahiko Fukuta and Yoshiaki Kai",

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AB - This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.

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An air-bearing displacement sensor for nanometrology of surface forms

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Keywords

ASJC Scopus subject areas

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