TY - GEN
T1 - An air-bearing displacement sensor for nanometrology of surface forms
AU - Lee, Kang Won
AU - Ito, So
AU - Shimizu, Yuki
AU - Gao, Wei
AU - Tanaka, Katsutoshi
AU - Fukuta, Masahiko
AU - Kai, Yoshiaki
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.
AB - This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.
KW - air-bearing
KW - measurement
KW - micro structures
KW - stylus
UR - http://www.scopus.com/inward/record.url?scp=84864229934&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84864229934&partnerID=8YFLogxK
U2 - 10.1109/I2MTC.2012.6229158
DO - 10.1109/I2MTC.2012.6229158
M3 - Conference contribution
AN - SCOPUS:84864229934
SN - 9781457717710
T3 - 2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings
SP - 2469
EP - 2471
BT - 2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings
T2 - 2012 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2012
Y2 - 13 May 2012 through 16 May 2012
ER -