An air-bearing displacement sensor for nanometrology of surface forms

Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.

Original languageEnglish
Title of host publication2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings
Pages2469-2471
Number of pages3
DOIs
Publication statusPublished - 2012 Jul 30
Event2012 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2012 - Graz, Austria
Duration: 2012 May 132012 May 16

Publication series

Name2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings

Other

Other2012 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2012
CountryAustria
CityGraz
Period12/5/1312/5/16

Keywords

  • air-bearing
  • measurement
  • micro structures
  • stylus

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Lee, K. W., Ito, S., Shimizu, Y., Gao, W., Tanaka, K., Fukuta, M., & Kai, Y. (2012). An air-bearing displacement sensor for nanometrology of surface forms. In 2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings (pp. 2469-2471). [6229158] (2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings). https://doi.org/10.1109/I2MTC.2012.6229158