@inproceedings{8972cdb18cf64ee88507e47220aa3dfd,
title = "An air-bearing displacement sensor for nanometrology of surface forms",
abstract = "This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.",
keywords = "air-bearing, measurement, micro structures, stylus",
author = "Lee, {Kang Won} and So Ito and Yuki Shimizu and Wei Gao and Katsutoshi Tanaka and Masahiko Fukuta and Yoshiaki Kai",
year = "2012",
month = jul,
day = "30",
doi = "10.1109/I2MTC.2012.6229158",
language = "English",
isbn = "9781457717710",
series = "2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings",
pages = "2469--2471",
booktitle = "2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings",
note = "2012 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2012 ; Conference date: 13-05-2012 Through 16-05-2012",
}