An AFM system with multi-mode scanning for large-area measurement

Yuguo Cui, Gaofa He, Yoshikazu Araic, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel atomic force microscope (AFM) system was constructed based on an air slide, an air spindle and a probe unit. It can carry out high-speed and large-area measurement for micro-structure surface with three scanning strategies of radial scanning, concentric scanning and spiral scanning. Using the AFM system, the micro-structure surface of a grating was measured with these scanning strategies. The measuring capability of them was researched by the experiment and the three measuring results were contrasted. The results show: compared with the other two scanning strategies, the spiral scanning mode can bring the best measuring image of the micro-structure profile, and it also spend the shortest time, it is only 50 seconds to finish scanning an circular area with 1 mm diameter.

Original languageEnglish
Title of host publication5th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationDesign, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
DOIs
Publication statusPublished - 2010 Dec 27
Event5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Dalian, China
Duration: 2010 Apr 262010 Apr 29

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7657
ISSN (Print)0277-786X

Other

Other5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
CountryChina
CityDalian
Period10/4/2610/4/29

Keywords

  • AFM
  • High-speed measurement
  • Large-area measurement
  • Multi-mode scanning

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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