Abstract
Hollow fibers for transmitting high-power ArF-excimer laser light are fabricated by Metal Organic Chemical Vapor Deposition (MOCVD) method. The hollow fibers with the inner diameter of 1 mm are fabricated by depositing an aluminum film on the inside of silica glass capillary by employing dimethyethylamine alane as the precursor. The fibers shows low-loss property, high durability, and high-energy threshold with the radiation of excimer lasers.
| Original language | English |
|---|---|
| Pages (from-to) | 292-297 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3911 |
| Publication status | Published - 2000 Jan 1 |
| Event | Biomedical Diagnostic, Guidance, and Surgical-Assist Systems II - San Jose, CA, USA Duration: 2000 Jan 25 → 2000 Jan 26 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
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Cite this
Matsuura, Y., Yamamoto, T., & Miyagi, M. (2000). Aluminum-hollow fiber delivery system for excimer lasers. Proceedings of SPIE - The International Society for Optical Engineering, 3911, 292-297.