An 8 × 8 chequered-pattern matrix array of vertical cavity surface emitting lasers (VCSELs) with alternately perpendicular polarisation was monolithically fabricated. It consisted of 64 VCSELs with 6 × 4μm2 rectangular post structures placed alternately perpendicular to each other, that is, they were placed alternately parallel and orthogonal to the <110> direction. The polarisation angle deviations of the two directions were only 4.1° and 2.9°, respectively. These results indicate that an arbitrarily-regulated-polarisation monolithic laser array can be obtained regardless of the wafer orientation.
- Semiconductor laser arrays
- Vertical cavity surface emitting lasers
ASJC Scopus subject areas
- Electrical and Electronic Engineering