Alignment-free top-contact formation for organic thin film transistors with submicron-length channel

Iwao Yagi; Kunji Shigeto; Kazuhito Tsukagoshi; Yoshinobu Aoyagi

doi:10.1143/JJAP.44.L479

Alignment-free top-contact formation for organic thin film transistors with submicron-length channel

Iwao Yagi, Kunji Shigeto, Kazuhito Tsukagoshi, Yoshinobu Aoyagi

Advanced Institute for Materials Research (AIMR)

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

We propose a simple fabrication method for self-aligned top contacts for an organic thin film transistor (TFT) that can be miniaturized. The self-aligned top electrodes are formed without any break in the vacuum condition after the formation of an organic channel on the substrate with a prefabricated insulating structure. As a demonstration of this method, pentacene TFTs with submicron-length channels have been fabricated and successfully operated. Scanning electron microscopy of TFTs reveals well-defined TFT structures as expected.

Original language	English
Pages (from-to)	L479-L481
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	44
Issue number	16-19
DOIs	https://doi.org/10.1143/JJAP.44.L479
Publication status	Published - 2005

Keywords

Alignment-free fabrication
Organic thin film transistor
Pentacene
Submicron-length channel
Top-contact

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/JJAP.44.L479

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AU - Shigeto, Kunji

AU - Tsukagoshi, Kazuhito

AU - Aoyagi, Yoshinobu

PY - 2005

Y1 - 2005

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AB - We propose a simple fabrication method for self-aligned top contacts for an organic thin film transistor (TFT) that can be miniaturized. The self-aligned top electrodes are formed without any break in the vacuum condition after the formation of an organic channel on the substrate with a prefabricated insulating structure. As a demonstration of this method, pentacene TFTs with submicron-length channels have been fabricated and successfully operated. Scanning electron microscopy of TFTs reveals well-defined TFT structures as expected.

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KW - Pentacene

KW - Submicron-length channel

KW - Top-contact

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