Air friction loss of comb drive resonant micro mirrors for laser scanning display

Chu Hoang Manh; Kazuhiro Hane

doi:10.1109/OMEMS.2009.5338561

Air friction loss of comb drive resonant micro mirrors for laser scanning display

Chu Hoang Manh, Kazuhiro Hane

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from 10⁵ Pa to 10^-1 Pa. The theoretical analyses on air friction loss are also presented.

Original language	English
Title of host publication	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages	125-126
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2009.5338561
Publication status	Published - 2009 Dec 16
Event	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: 2009 Aug 17 → 2009 Aug 20

Publication series

Name	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Country/Territory	United States
City	Clearwater, FL
Period	09/8/17 → 09/8/20

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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10.1109/OMEMS.2009.5338561

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Air friction loss of comb drive resonant micro mirrors for laser scanning display. / Manh, Chu Hoang; Hane, Kazuhiro.

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 125-126 5338561 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Manh, CH & Hane, K 2009, Air friction loss of comb drive resonant micro mirrors for laser scanning display. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338561, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, pp. 125-126, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 09/8/17. https://doi.org/10.1109/OMEMS.2009.5338561

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title = "Air friction loss of comb drive resonant micro mirrors for laser scanning display",

abstract = "The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from 105 Pa to 10-1 Pa. The theoretical analyses on air friction loss are also presented.",

author = "Manh, {Chu Hoang} and Kazuhiro Hane",

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doi = "10.1109/OMEMS.2009.5338561",

language = "English",

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series = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

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N2 - The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from 105 Pa to 10-1 Pa. The theoretical analyses on air friction loss are also presented.

AB - The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from 105 Pa to 10-1 Pa. The theoretical analyses on air friction loss are also presented.

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Air friction loss of comb drive resonant micro mirrors for laser scanning display

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