TY - GEN
T1 - Air friction loss of comb drive resonant micro mirrors for laser scanning display
AU - Manh, Chu Hoang
AU - Hane, Kazuhiro
PY - 2009/12/16
Y1 - 2009/12/16
N2 - The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from 105 Pa to 10-1 Pa. The theoretical analyses on air friction loss are also presented.
AB - The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from 105 Pa to 10-1 Pa. The theoretical analyses on air friction loss are also presented.
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U2 - 10.1109/OMEMS.2009.5338561
DO - 10.1109/OMEMS.2009.5338561
M3 - Conference contribution
AN - SCOPUS:71749086397
SN - 9781424423828
T3 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
SP - 125
EP - 126
BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
T2 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Y2 - 17 August 2009 through 20 August 2009
ER -