Air friction loss of comb drive resonant micro mirrors for laser scanning display

Chu Hoang Manh, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric air at the same operation voltage, which corresponds to the decrease of operation voltage by a factor more than 7 at 24.5 kHz resonant frequency. The quality factor depending on air damping is investigated in pressure range from 105 Pa to 10-1 Pa. The theoretical analyses on air friction loss are also presented.

Original languageEnglish
Title of host publication2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages125-126
Number of pages2
DOIs
Publication statusPublished - 2009 Dec 16
Event2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States
Duration: 2009 Aug 17 → 2009 Aug 20

Publication series

Name2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Other

Other2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
CountryUnited States
CityClearwater, FL
Period09/8/17 → 09/8/20

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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