Air-bearing surface chemical modification for low-friction head-disk interface

Yuki Shimizu, Junguo Xu, Shozo Saegusa, Noritsugu Umehara

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


As a chemical modification of slider air bearing surface (ABS), fluorine ion implantation (FII) was conducted. FII treated ABS was fabricated to reduce slider surface energy, which is expected to reduce adhesion and friction force between the slider and disk. Tribological performance, such as slider flyability, was experimentally investigated. Touchdown speed, corresponds to a flying height of about 0.4 nm, was reduced by FII treatment. Slider touch-down and take-off hysteresis was also improved by reducing the adhesive force of the lubricant by fluorine-ion implantation. AE output and friction force were also reduced in the drag test. FII treated slider showed a 45% reduction of AE amplitude and 14% reduction of friction force. FII treatment was confirmed to be effective in improving slider flyability.

Original languageEnglish
Pages (from-to)811-816
Number of pages6
JournalMicrosystem Technologies
Issue number8-10
Publication statusPublished - 2007 May 1
Externally publishedYes


  • Anti-wetting
  • Contact angle
  • Fluorine-ion implantation
  • Head-disk interface
  • Meniscus force

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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