Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region

Takeo Ejima, Atsushi Yamazaki, Takanori Banse, Katsuhiko Saito, Yuji Kondo, Satoshi Ichimaru, Hisataka Takenaka

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Abstract

Reflection measurements in the 25-35 nm region were made for Mg/SiC and Mg/Y2O3 multilayers kept in a low-humidity atmosphere for 4 or 5 years. Aged Mg/SiC multilayers keep their reflectances, and the reflectance value at 31.2 nm is 0.44 at 10° of the normal angle of incidence. Aged Mg/Y2O3 multilayers change reflectance as top layer materials, and the best value at 30.1 nm is 0.40 at 10°. Reflection measurements are also made for Mg-based multilayers that are annealed from room temperature to 400°C at 50°C intervals. Both multilayers keep their reflectance at annealing temperatures of 200°C. These results suggest that both Mg-based multilayers can be applied to practical optics.

Original languageEnglish
Pages (from-to)5446-5453
Number of pages8
JournalApplied optics
Volume44
Issue number26
DOIs
Publication statusPublished - 2005 Sep 10

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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