AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces

Y. G. Cui, B. F. Ju, J. Aoki, Y. Arai, W. Gao

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint Dive into the research topics of 'AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science