Abstract
In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.
Original language | English |
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Pages (from-to) | 35-38 |
Number of pages | 4 |
Journal | Key Engineering Materials |
Volume | 381-382 |
DOIs | |
Publication status | Published - 2008 |
Keywords
- AFM
- Constant-height mode scan
- Micro-structures
- Micro/nano-metrology
- Slope compensation
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering