AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces

Y. G. Cui; B. F. Ju; J. Aoki; Y. Arai; W. Gao

doi:10.4028/www.scientific.net/kem.381-382.35

AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces

Y. G. Cui, B. F. Ju, J. Aoki, Y. Arai, W. Gao

ENG - Finemechanics

Research output: Contribution to journal › Article

2 Citations (Scopus)

Abstract

In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.

Original language	English
Pages (from-to)	35-38
Number of pages	4
Journal	Key Engineering Materials
Volume	381-382
DOIs	https://doi.org/10.4028/www.scientific.net/kem.381-382.35
Publication status	Published - 2008 Jan 1

Keywords

AFM
Constant-height mode scan
Micro-structures
Micro/nano-metrology
Slope compensation

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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@article{6b556d80302d4961b3dc3a1c9f49e414,

title = "AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces",

abstract = "In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.",

keywords = "AFM, Constant-height mode scan, Micro-structures, Micro/nano-metrology, Slope compensation",

author = "Cui, {Y. G.} and Ju, {B. F.} and J. Aoki and Y. Arai and W. Gao",

year = "2008",

month = jan,

day = "1",

doi = "10.4028/www.scientific.net/kem.381-382.35",

language = "English",

volume = "381-382",

pages = "35--38",

journal = "Key Engineering Materials",

issn = "1013-9826",

publisher = "Trans Tech Publications",

}

TY - JOUR

T1 - AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces

AU - Cui, Y. G.

AU - Ju, B. F.

AU - Aoki, J.

AU - Arai, Y.

AU - Gao, W.

PY - 2008/1/1

Y1 - 2008/1/1

N2 - In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.

AB - In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.

KW - AFM

KW - Constant-height mode scan

KW - Micro-structures

KW - Micro/nano-metrology

KW - Slope compensation

UR - http://www.scopus.com/inward/record.url?scp=47049116580&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=47049116580&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/kem.381-382.35

DO - 10.4028/www.scientific.net/kem.381-382.35

M3 - Article

AN - SCOPUS:47049116580

VL - 381-382

SP - 35

EP - 38

JO - Key Engineering Materials

JF - Key Engineering Materials

SN - 1013-9826

ER -