AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces

Y. G. Cui, B. F. Ju, J. Aoki, Y. Arai, W. Gao

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.

Original languageEnglish
Pages (from-to)35-38
Number of pages4
JournalKey Engineering Materials
Volume381-382
DOIs
Publication statusPublished - 2008 Jan 1

Keywords

  • AFM
  • Constant-height mode scan
  • Micro-structures
  • Micro/nano-metrology
  • Slope compensation

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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