AFM fabrication of oxide patterns and immobilization of biomolecules on Si surface

T. Yoshinobu, J. Suzuki, H. Kurooka, W. C. Moon, H. Iwasaki

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

A novel method of protein patterning based on anodic oxidation of Si surface by atomic force microscope (AFM) is presented. An oxide pattern is drawn on the Si surface by applying d.c. voltage between the Au-coated AFM tip and the Si substrate. The oxide patterns can be used as a template for patterning of biomolecules. Protocols for both positive and negative patterning of protein were established.

Original languageEnglish
Pages (from-to)3131-3135
Number of pages5
JournalElectrochimica Acta
Volume48
Issue number20-22
DOIs
Publication statusPublished - 2003 Sep 30

Keywords

  • Anodic oxidation
  • Atomic force microscope
  • Patterning
  • Protein
  • Silicon

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Electrochemistry

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