Advances in short-wavelength X-ray multilayer optics: Toward high-throughput multi-mirror systems for the wavelengths < 10 nm

Igor A. Artyukov, Yegor A. Bugayev, Oleksandr Yu Devizenko, Ruslan M. Feshchenko, Tadashi Hatano, Yuri S. Kasyanov, Valeri V. Kondratenko, Yuri A. Uspenski, Alexander V. Vinogradov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents novel approaches and techniques in development and application of multi-mirror X-ray optical systems operating in the spectral region of "carbon window" (λ ∼ 4.5 nm). Two approaches for fabrication of the graded Co/C multilayer mirrors for Schwarzschild objective are presented. A pair of the spherical mirrors with Co/C multilayer coatings was tested in combination with scandium/carbon filters and laser produced plasma X-ray source for stereoimaging of low density materials at λ ∼ 4.5 nm.

Original languageEnglish
Title of host publicationSoft X-Ray Lasers and Applications VII
DOIs
Publication statusPublished - 2007 Dec 1
EventSoft X-Ray Lasers and Applications VII - San Diego, CA, United States
Duration: 2007 Aug 292007 Aug 30

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6702
ISSN (Print)0277-786X

Other

OtherSoft X-Ray Lasers and Applications VII
CountryUnited States
CitySan Diego, CA
Period07/8/2907/8/30

Keywords

  • Carbon window
  • Low density materials
  • Mask-assisted magnetron sputtering
  • Schwarzschild objective
  • Soft X-ray imaging
  • X-ray multilayer optics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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