@article{735d25c4ace64a7cb3b99c5680283228,
title = "Advances in low-temperature bonding technologies for 3D integration",
author = "Tadatomo Suga and Naoteru Shigekawa and Eiji Higurashi and Hideki Takagi and Kazuhiko Shimomura",
year = "2015",
month = mar,
day = "1",
doi = "10.7567/JJAP.54.030200",
language = "English",
volume = "54",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "3",
}