Advanced tape expansion/assembly technology for FOWLP and micro-LED display

T. Fukushima, H. Yonekura, F. Doi, S. Endo, T. Fushimi, K. Yanagimura, M. Koyanagi, T. Tanaka, M. Motoyoshi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes advanced assembly technologies based on a new tape expansion technique with a selective UV irradiation method for the application of FOWLP (Fan-Out Wafer-Level Packaging) with millimeter-scale dies and micro-LED display with several tens of micrometer-scaled dielets. The assembly technologies allow us to uniformly expand expansion tapes in all direction and array the dies/dielets at the regular pitches desired for their products. We demonstrate the uniform expansion of an expansion tape with 3-mm-square Si dies and 50-μm-square Si dielets using selectively irradiated UV light through a photomask.

Original languageEnglish
Title of host publication13th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2018
PublisherIEEE Computer Society
Pages210-213
Number of pages4
ISBN (Electronic)9781538656150
DOIs
Publication statusPublished - 2019 Jan 24
Event13th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2018 - Taipei, Taiwan, Province of China
Duration: 2018 Oct 242018 Oct 26

Publication series

NameProceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
Volume2018-October
ISSN (Print)2150-5934
ISSN (Electronic)2150-5942

Conference

Conference13th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2018
Country/TerritoryTaiwan, Province of China
CityTaipei
Period18/10/2418/10/26

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Advanced tape expansion/assembly technology for FOWLP and micro-LED display'. Together they form a unique fingerprint.

Cite this