TY - JOUR
T1 - Advanced plasma science and its applications for nitride and nanomaterials
AU - Kamiyama, Satoshi
AU - Fujiwara, Yasufumi
AU - Hiramatsu, Mineo
AU - Ito, Masafumi
AU - Kaneko, Toshiro
AU - Kasu, Makoto
AU - Miyake, Hideto
AU - Nakamura, Keiji
AU - Sawada, Kazuaki
AU - Sekine, Makoto
AU - Setsuhara, Yuichi
AU - Shirafuji, Tatsuru
AU - Takikawa, Hirofumi
AU - Terashima, Kazuo
AU - Wakahara, Akihiro
AU - Watanabe, Yoshimi
N1 - Funding Information:
Acknowledgements: We thank Dr. T. ZABOTINA for help in F ACScan-analysis. This work was supported by grants 93-04-21355 from the Russian Foundation for Basic Research.
PY - 2014/11/1
Y1 - 2014/11/1
N2 - The special issue of Japanese Journal of Applied Physics consists of peer-reviewed papers based on presentations at the 6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014) held at Meijo University, Nagoya, Japan during March 3-6, 2014. The scope of the symposium is advanced plasma science and technology and its application in nitride and related materials research and in nanomaterial research. A total of 362 papers including 46 invited talks and 50 contributed talks were presented at the symposium, attended by 529 participants including 133 from overseas.
AB - The special issue of Japanese Journal of Applied Physics consists of peer-reviewed papers based on presentations at the 6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014) held at Meijo University, Nagoya, Japan during March 3-6, 2014. The scope of the symposium is advanced plasma science and technology and its application in nitride and related materials research and in nanomaterial research. A total of 362 papers including 46 invited talks and 50 contributed talks were presented at the symposium, attended by 529 participants including 133 from overseas.
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U2 - 10.7567/JJAP.53.11R001
DO - 10.7567/JJAP.53.11R001
M3 - Article
AN - SCOPUS:84910602836
VL - 53
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 11
M1 - 11R001
ER -