Advanced form of ζ-factor method in analytical electron microscopy

Takeshi Fujita, Masashi Watanabe, Zenji Horita, Minoru Nemoto

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


This study describes development of the ζ-factor method proposed earlier. The development is attempted by incorporating the absorption correction term into the equation relating the mass thickness to the characteristic X-ray intensity. It is shown that the advanced form of the ζ-factor method reduces restriction encountered by the earlier form and thus enhances applicability of the ζ-factor method. The advanced form is applied to the Ni-Al binary system and the Ti-Al-Cr ternary system. This application demonstrates the validity of the advanced form of the ζ-factor method. The relation between the ζ factor and the k factor is discussed and an advantage of using the ζ-factor method is summarized.

Original languageEnglish
Pages (from-to)561-568
Number of pages8
JournalJournal of Electron Microscopy
Issue number5
Publication statusPublished - 1999


  • Absorption correction
  • Ni-Al system
  • Quantitative microanalysis
  • Thickness determination
  • Ti-Al-Cr system
  • k factor

ASJC Scopus subject areas

  • Instrumentation


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