Advanced FinFET process technology for 20 nm node and beyond

M. Masahara, T. Matsukawa, K. Endo, Y. X. Liu, W. Mizubayashi, S. Migita, S. O'Uchi, H. Ota, Y. Morita

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

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Engineering & Materials Science