Advanced direct-polish process on organic non-porous ultra low-k fluorocarbon dielectric on Cu interconnects

Xun Gu, Takenao Nemoto, Yugo Tomita, Ricardo Duyos Mateo, Akinobu Teramoto, Shin Ichiro Kuroki, Shigetoshi Sugawa, Tadahiro Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

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Engineering & Materials Science