Advanced 2.5D/3D hetero-integration technologies at GINTI, Tohoku University

K. W. Lee, J. C. Bea, M. Koyanagi, T. Fukushima, T. Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The Global Integration Initiative (GINTI) is 8/12-inch R&D foundry fab for the research and development of new 2.5D/3D integration technologies and creative applications. GINTI offers a broad range of services to meet the mounting R&D needs of the semiconductor industry and related industries. GINTI provides a cost-competitive process development infrastructure in a manufacturing-like fab environment and a low-cost, short TAT prototyping of proof of concepts using commercial/customized 2D chip/wafer, and a base-line process set-up for the pilot production of creative 3D systems. GINTI aims to provide Tohoku University's advanced 2.5D/3D integration technologies into electronic industries to accelerate the commercialization of innovative 3D technologies and applications into real, manufacturing-ready technology solutions with FAST. This paper introduces advanced 2.5D/3D hetero-integration technologies developed by GINTI/Tohoku University.

Original languageEnglish
Title of host publication2015 International 3D Systems Integration Conference, 3DIC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesFS2.1-FS2.5
ISBN (Electronic)9781467393850
DOIs
Publication statusPublished - 2015 Nov 20
EventInternational 3D Systems Integration Conference, 3DIC 2015 - Sendai, Japan
Duration: 2015 Aug 312015 Sep 2

Publication series

Name2015 International 3D Systems Integration Conference, 3DIC 2015

Other

OtherInternational 3D Systems Integration Conference, 3DIC 2015
CountryJapan
CitySendai
Period15/8/3115/9/2

Keywords

  • 3-D heterogeneous integration
  • backside TSV
  • chip self-assembly

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Advanced 2.5D/3D hetero-integration technologies at GINTI, Tohoku University'. Together they form a unique fingerprint.

Cite this