Adsorption of Carbonaceous Gases on Si Surfaces

Tsuyoshi Takaoka, Isao Kusunoki

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)981-991
Number of pages11
JournalShinku/Journal of the Vacuum Society of Japan
Issue number12
Publication statusPublished - 1998 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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