Adsorption of Carbonaceous Gases on Si Surfaces

Tsuyoshi Takaoka, Isao Kusunoki

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)981-991
    Number of pages11
    JournalShinku/Journal of the Vacuum Society of Japan
    Issue number12
    Publication statusPublished - 1998 Jan

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering

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