Active material micro-actuator arrays fabricated with SU-8 resin

B. J. Pokines, J. Tani, Masayoshi Esashi, T. Hamano, K. Mizuno, D. J. Inman

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Active materials such as piezoelectric ceramics and shape memory metal alloys commonly actuate active control and intelligent material systems. Commercially available piezoelectric materials exhibit small actuation stroke and shape memory metal alloys have limited bandwidth. The proposed micro-actuator array design and fabrication process increases the actuation stroke of piezoceramic material by a factor of 1.5 for a 2 x 2 array; two active material segments connected in parallel and two in series, and doubles the response time of a 1 x 4 shape memory alloy driven array; four active materials segments connected in series. A high aspect ratio fabrication method incorporating SU-8 resin and conventional lithography is the process that forms the array linkages. The SU-8 resin array structures are 300 μm tall.

Original languageEnglish
Pages (from-to)117-119
Number of pages3
JournalMicrosystem Technologies
Volume7
Issue number3
DOIs
Publication statusPublished - 2001 Oct 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Pokines, B. J., Tani, J., Esashi, M., Hamano, T., Mizuno, K., & Inman, D. J. (2001). Active material micro-actuator arrays fabricated with SU-8 resin. Microsystem Technologies, 7(3), 117-119. https://doi.org/10.1007/s005420100093