Activation of S+‐implanted inp by scanned CW laser irradiation

R. Fremunt; Y. Hirayama; F. Arai; T. Sugano

doi:10.1002/pssa.2210870151

Activation of S⁺‐implanted inp by scanned CW laser irradiation

R. Fremunt, Y. Hirayama, F. Arai, T. Sugano

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	K49-K52
Journal	physica status solidi (a)
Volume	87
Issue number	1
DOIs	https://doi.org/10.1002/pssa.2210870151
Publication status	Published - 1985 Jan 16
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1002/pssa.2210870151

Cite this

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title = "Activation of S+‐implanted inp by scanned CW laser irradiation",

author = "R. Fremunt and Y. Hirayama and F. Arai and T. Sugano",

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AU - Sugano, T.

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JO - Physica Status Solidi (A) Applied Research

JF - Physica Status Solidi (A) Applied Research

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Activation of S+‐implanted inp by scanned CW laser irradiation

ASJC Scopus subject areas

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Activation of S⁺‐implanted inp by scanned CW laser irradiation