The current density versus time (J-t) characteristics of yttria-stabilized-zirconia (YSZ) films on Si(001) below 150°C were measured. By the application of a negative voltage up to 20 V to the aluminum top electrode, a current peak was observed. The peak evolution was considered on the basis of the space-charge-limited current transient of oxygen vacancy (model-1), and the modulation of electronic conductivity upon oxygen vacancy redistribution (model-2). From the point of view of the activation energy and the relative dielectric constant estimation, model-2 gave a more plausible value. It was also observed, based on J-t measurements, that Nb-doping causes the suppression of oxygen vacancies.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Publication status||Published - 2006 May 19|
- Activation energy
- Dc current measurements
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)