Acoustically Levitated Spinning Optical Scanner

Takashi Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel concept for obtaining a wide-angle two-dimensional scanner using the acoustic levitating method is proposed. A lightweight and high-surface quality silicon mirror is fabricated by micromachining and it is attached vertically on the 3 mm diameter polymer disc with a ferromagnetic rod for fabricating a mirror rotor. The size of the mirror is about 1 mm and the weight of the mirror rotor is 800 ug. The levitating and 360 degrees rotation of the fabricated mirror rotor is demonstrated by placing the mirror rotor in the standing acoustic field and rotating magnetic field, successfully. In addition, the tilting of the rotational axis of the fabricated mirror rotor during the rotation for creating the two-dimensional laser scanning is also demonstrated by this proposed concept, successfully.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages439-442
Number of pages4
ISBN (Electronic)9781665412674
DOIs
Publication statusPublished - 2021 Jun 20
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 2021 Jun 202021 Jun 25

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period21/6/2021/6/25

Keywords

  • Acoustic levitating
  • LiDER
  • MEMS scanner
  • two-dimensional scanner
  • wide-angle scanner

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Instrumentation

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