Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

Yung Yu Chen, Li Chung Huang, Wei Shan Wang, Yu Ching Lin, Tsung Tsong Wu, Jia Hong Sun, Masayoshi Esashi

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCMs resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce spurious modes. Accordingly, the phononic crystal is verified to be capable of suppressing the acoustic interference between adjacent QCMs in a sensor array.

Original languageEnglish
Article number153514
JournalApplied Physics Letters
Volume102
Issue number15
DOIs
Publication statusPublished - 2013 Apr 15

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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  • Cite this

    Chen, Y. Y., Huang, L. C., Wang, W. S., Lin, Y. C., Wu, T. T., Sun, J. H., & Esashi, M. (2013). Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals. Applied Physics Letters, 102(15), [153514]. https://doi.org/10.1063/1.4802781