TY - GEN
T1 - Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection
AU - Latif, Imran
AU - Toda, Masaya
AU - Ono, Takahito
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/1
Y1 - 2020/1
N2 - This paper presents a novel approach to enhance the SNR performance of acoustic wave detection in solids using resonant acoustic devices, particularly those based on photoacoustics, by the manipulation of reflection properties at the interface of two wave propagation media. In contrast to a simple construction, the periphery of the detection platform is designed to match a parametric curvature that reflects the acoustic waves to the geometrical focus where a resonant micromechanical element is fabricated. The approach is validated by time-domain simulations on a platform comprising of an elliptical periphery. The initial experiments conducted with piezo acoustic excitation demonstrate the improvement in the signal amplitude for acoustic waves by an order of magnitude compared to a general case. This method is the first attempt employing the parametric curved geometries as acoustic guides to achieve improved detection sensitivities for micromechanical acoustic wave detection.
AB - This paper presents a novel approach to enhance the SNR performance of acoustic wave detection in solids using resonant acoustic devices, particularly those based on photoacoustics, by the manipulation of reflection properties at the interface of two wave propagation media. In contrast to a simple construction, the periphery of the detection platform is designed to match a parametric curvature that reflects the acoustic waves to the geometrical focus where a resonant micromechanical element is fabricated. The approach is validated by time-domain simulations on a platform comprising of an elliptical periphery. The initial experiments conducted with piezo acoustic excitation demonstrate the improvement in the signal amplitude for acoustic waves by an order of magnitude compared to a general case. This method is the first attempt employing the parametric curved geometries as acoustic guides to achieve improved detection sensitivities for micromechanical acoustic wave detection.
KW - acoustic impedance
KW - acoustic sensor
KW - parametric platforms
KW - resonator
KW - wave reflection
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U2 - 10.1109/MEMS46641.2020.9056209
DO - 10.1109/MEMS46641.2020.9056209
M3 - Conference contribution
AN - SCOPUS:85083222150
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 834
EP - 837
BT - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Y2 - 18 January 2020 through 22 January 2020
ER -