Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a novel approach to enhance the SNR performance of acoustic wave detection in solids using resonant acoustic devices, particularly those based on photoacoustics, by the manipulation of reflection properties at the interface of two wave propagation media. In contrast to a simple construction, the periphery of the detection platform is designed to match a parametric curvature that reflects the acoustic waves to the geometrical focus where a resonant micromechanical element is fabricated. The approach is validated by time-domain simulations on a platform comprising of an elliptical periphery. The initial experiments conducted with piezo acoustic excitation demonstrate the improvement in the signal amplitude for acoustic waves by an order of magnitude compared to a general case. This method is the first attempt employing the parametric curved geometries as acoustic guides to achieve improved detection sensitivities for micromechanical acoustic wave detection.

Original languageEnglish
Title of host publication33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages834-837
Number of pages4
ISBN (Electronic)9781728135809
DOIs
Publication statusPublished - 2020 Jan
Event33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
Duration: 2020 Jan 182020 Jan 22

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2020-January
ISSN (Print)1084-6999

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
CountryCanada
CityVancouver
Period20/1/1820/1/22

Keywords

  • acoustic impedance
  • acoustic sensor
  • parametric platforms
  • resonator
  • wave reflection

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Latif, I., Toda, M., & Ono, T. (2020). Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 834-837). [9056209] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056209