Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection

Imran Latif; Masaya Toda; Takahito Ono

doi:10.1109/MEMS46641.2020.9056209

Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection

Imran Latif, Masaya Toda, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a novel approach to enhance the SNR performance of acoustic wave detection in solids using resonant acoustic devices, particularly those based on photoacoustics, by the manipulation of reflection properties at the interface of two wave propagation media. In contrast to a simple construction, the periphery of the detection platform is designed to match a parametric curvature that reflects the acoustic waves to the geometrical focus where a resonant micromechanical element is fabricated. The approach is validated by time-domain simulations on a platform comprising of an elliptical periphery. The initial experiments conducted with piezo acoustic excitation demonstrate the improvement in the signal amplitude for acoustic waves by an order of magnitude compared to a general case. This method is the first attempt employing the parametric curved geometries as acoustic guides to achieve improved detection sensitivities for micromechanical acoustic wave detection.

Original language	English
Title of host publication	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	834-837
Number of pages	4
ISBN (Electronic)	9781728135809
DOIs	https://doi.org/10.1109/MEMS46641.2020.9056209
Publication status	Published - 2020 Jan
Event	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: 2020 Jan 18 → 2020 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2020-January
ISSN (Print)	1084-6999

Conference

Conference	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/Territory	Canada
City	Vancouver
Period	20/1/18 → 20/1/22

Keywords

acoustic impedance
acoustic sensor
parametric platforms
resonator
wave reflection

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS46641.2020.9056209

Cite this

Latif, I., Toda, M., & Ono, T. (2020). Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 834-837). [9056209] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056209

Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection. / Latif, Imran; Toda, Masaya ; Ono, Takahito.

33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 834-837 9056209 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Latif, I, Toda, M & Ono, T 2020, Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection. in 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020., 9056209, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2020-January, Institute of Electrical and Electronics Engineers Inc., pp. 834-837, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020, Vancouver, Canada, 20/1/18. https://doi.org/10.1109/MEMS46641.2020.9056209

Latif I, Toda M , Ono T. Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 834-837. 9056209. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMS46641.2020.9056209

Latif, Imran ; Toda, Masaya ; Ono, Takahito. / Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection. 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 834-837 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "This paper presents a novel approach to enhance the SNR performance of acoustic wave detection in solids using resonant acoustic devices, particularly those based on photoacoustics, by the manipulation of reflection properties at the interface of two wave propagation media. In contrast to a simple construction, the periphery of the detection platform is designed to match a parametric curvature that reflects the acoustic waves to the geometrical focus where a resonant micromechanical element is fabricated. The approach is validated by time-domain simulations on a platform comprising of an elliptical periphery. The initial experiments conducted with piezo acoustic excitation demonstrate the improvement in the signal amplitude for acoustic waves by an order of magnitude compared to a general case. This method is the first attempt employing the parametric curved geometries as acoustic guides to achieve improved detection sensitivities for micromechanical acoustic wave detection.",

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AB - This paper presents a novel approach to enhance the SNR performance of acoustic wave detection in solids using resonant acoustic devices, particularly those based on photoacoustics, by the manipulation of reflection properties at the interface of two wave propagation media. In contrast to a simple construction, the periphery of the detection platform is designed to match a parametric curvature that reflects the acoustic waves to the geometrical focus where a resonant micromechanical element is fabricated. The approach is validated by time-domain simulations on a platform comprising of an elliptical periphery. The initial experiments conducted with piezo acoustic excitation demonstrate the improvement in the signal amplitude for acoustic waves by an order of magnitude compared to a general case. This method is the first attempt employing the parametric curved geometries as acoustic guides to achieve improved detection sensitivities for micromechanical acoustic wave detection.

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Acoustic Amplification Using Characteristic Geometry-Based Integrated Platforms for Micromechanical Resonant Detection

Abstract

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Keywords

ASJC Scopus subject areas

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