Accurate velocity measurement of periodic striae of TiO2- SiO2 glasses by the line-focus-beam ultrasonic material- characterization system

Mototaka Arakawa, Jun Ichi Kushibiki, Yuji Ohashi, Kouji Suzuki

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

The evaluation of periodic striae layers in TiO2-SiO2 ultra-low-expansion glasses, formed during production, is discussed through the measurement of leaky surface acoustic-wave (LSAW) velocities by the line-focus-beam (LFB) ultrasonic material-characterization system. The averaging effect associated with an LSAW propagation region interacting with periodic striae on a specimen surface was examined at 225 MHz, taking several specimens prepared with inclination angles of θ = 0,2, 5, 10, 20, and 90° to the plane of striae layers with a periodicity of 0.16mm. LSAW velocities corresponding to TiO2 concentrations in the glass were properly measured for the specimens with θ less than 10°, and the perpendicular specimen (θ = 90°) was suitable for accurate determination of the striae periodicities for LSAW propagation perpendicular to the striae plane.

Original languageEnglish
Pages (from-to)8925-8927
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number11
DOIs
Publication statusPublished - 2006 Nov 15

Keywords

  • CTE evaluation
  • Extreme ultraviolet lithography system
  • Leaky surface acoustic waves
  • Line-focus-beam ultrasonic material-characterization system
  • Striae evaluation
  • TiO-doped SiO ultra-low-expansion glass
  • Velocity measurement

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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