Accurate calibration line for super-precise coefficient of thermal expansion evaluation technology of TiO2-doped SiO2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system

Mototaka Arakawa, Jun Ichi Kushibiki, Yuji Ohashi, Kouji Suzuki

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

We obtained an accurate relationship between the leaky surface acoustic wave (LSAW) velocities and TiO2 concentrations. Such a relationship is needed for the line-focus-beam ultrasonic material characterization (LFB-UMC) system as a new technology for evaluating the coefficient of thermal expansion (CTE) of ultra-low-expansion glasses with extremely high precision. Using commercially available TiO2-SiO2 glass with periodic striae, averaged velocities for LSAW propagation parallel to the striae plane at 225 MHz and averaged TiO2 concentrations by X-ray fluorescence analysis were measured on the surface of seven specimen substrates prepared perpendicular to the striae plane. The obtained sensitivity of LSAW velocity to TiO2 concentration was -0.0601 wt%/(m/s), and the measurement resolution was estimated to be ±0.0084wt% for ±2σ (σ: standard deviation) from the LSAW velocity measurement resolution of ±0.14 m/s. The TiO2 concentration for the standard TiO 2-SiO2 glass specimen with a LSAW velocity of 3308.18 m/s for system calibration was determined to be 7.09 wt %. This ultrasonic technology will contribute greatly to the development of the ultra-low-expansion glasses needed for extreme ultraviolet lithography (EUVL) systems.

Original languageEnglish
Pages (from-to)4511-4515
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number5 B
DOIs
Publication statusPublished - 2006 May 25

Keywords

  • CTE evaluation
  • Chemical composition analysis
  • Extreme ultraviolet lithography system
  • Leaky surface acoustic waves
  • Line-focus-beam ultrasonic material characterization system
  • TiO -doped SiO glass
  • Velocity measurement

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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