Accuracy of measurements in stereoscopic observations by using transmission electron microscope

Takafumi Niwa, Yoichi Ikematsu, Akira Taniyama, Daisuke Shindo

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

To evaluate the accuracy of measurements using stereoscopic observation employing a transmission electron microscope (TEM), the thickness (∼0.6 μm) of platelet-type α-Fe2O3 particles was investigated by stereoscopic observation using TEMs and imaging plates. The accuracy of these measurements was evaluated by comparing ts with tg, where ts and tg were the thicknesses determined by stereoscopic observation and geometric calculation taking the particle's shape into account, respectively. The standard deviation of the difference between ts and tg decreases with increased tilt angle up to 20°. The minimum standard deviation of the difference was evaluated to be 4.8% at a tilt angle of 20°. From the present study, it was found that a particle's shape, such as thickness on a sub-micrometer scale, can be evaluated by stereoscopic observation using a TEM set at the highest accuracy at a tilt angle of about 20°.

Original languageEnglish
Pages (from-to)93-97
Number of pages5
JournalNippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Volume67
Issue number2
DOIs
Publication statusPublished - 2003 Feb

Keywords

  • Imaging plate
  • Platelet-type α-FeO particles
  • Specimen thickness
  • Stereoscopic observation
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys
  • Materials Chemistry

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