Academic approach to new industry-relevant MEMS

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper introduces recent collaboration between Tohoku University and industry in MEMS (micro electro mechanical systems) field. The selected examples of devices are an integrated network tactile sensor for robot applications, a tunable SAW (surface acoustic wave) filter for TV white space cognitive WiFi communication and an anodically-bondable LTCC (low temperature cofired ceramic) wafer for wafer-level hermetic MEMS packaging. In the last part of this paper, multi-leveled shared MEMS facilities available for industrial collaboration are summarized. The most important message here is that we are strongly motivated to contribute to industry in multiple manners.

Original languageEnglish
Title of host publicationChina Semiconductor Technology International Conference 2015, CSTIC 2015
EditorsQinghuang Lin, Beichao Zhang, Larry Chen, Hsiang-Lan Lung, Kafei Lai, Dong Chen, Ying Zhang, David Huang, Kuochun Wu, Cor Claeys, Steve Liang, Ru Huang, Peilin Song, Hanming Wu, Qi Wang
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479972418
DOIs
Publication statusPublished - 2015 Jul 8
Event2015 China Semiconductor Technology International Conference, CSTIC 2015 - Shanghai, China
Duration: 2015 Mar 152015 Mar 16

Publication series

NameChina Semiconductor Technology International Conference 2015, CSTIC 2015

Other

Other2015 China Semiconductor Technology International Conference, CSTIC 2015
Country/TerritoryChina
CityShanghai
Period15/3/1515/3/16

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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