Academic approach to new industry-relevant MEMS

Shuji Tanaka

doi:10.1109/CSTIC.2015.7153479

Academic approach to new industry-relevant MEMS

Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The paper introduces recent collaboration between Tohoku University and industry in MEMS (micro electro mechanical systems) field. The selected examples of devices are an integrated network tactile sensor for robot applications, a tunable SAW (surface acoustic wave) filter for TV white space cognitive WiFi communication and an anodically-bondable LTCC (low temperature cofired ceramic) wafer for wafer-level hermetic MEMS packaging. In the last part of this paper, multi-leveled shared MEMS facilities available for industrial collaboration are summarized. The most important message here is that we are strongly motivated to contribute to industry in multiple manners.

Original language	English
Title of host publication	China Semiconductor Technology International Conference 2015, CSTIC 2015
Editors	Cor Claeys, Qinghuang Lin, David Huang, Hanming Wu, Ru Huang, Kafei Lai, Ying Zhang, Beichao Zhang, Kuochun Wu, Larry Chen, Steve Liang, Peilin Song, Hsiang-Lan Lung, Dong Chen, Qi Wang
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479972418
DOIs	https://doi.org/10.1109/CSTIC.2015.7153479
Publication status	Published - 2015 Jul 8
Event	2015 China Semiconductor Technology International Conference, CSTIC 2015 - Shanghai, China Duration: 2015 Mar 15 → 2015 Mar 16

Publication series

Name	China Semiconductor Technology International Conference 2015, CSTIC 2015

Other

Other	2015 China Semiconductor Technology International Conference, CSTIC 2015
Country/Territory	China
City	Shanghai
Period	15/3/15 → 15/3/16

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/CSTIC.2015.7153479

Cite this

Tanaka, S. (2015). Academic approach to new industry-relevant MEMS. In C. Claeys, Q. Lin, D. Huang, H. Wu, R. Huang, K. Lai, Y. Zhang, B. Zhang, K. Wu, L. Chen, S. Liang, P. Song, H-L. Lung, D. Chen, & Q. Wang (Eds.), China Semiconductor Technology International Conference 2015, CSTIC 2015 [7153479] (China Semiconductor Technology International Conference 2015, CSTIC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CSTIC.2015.7153479

Academic approach to new industry-relevant MEMS. / Tanaka, Shuji.

China Semiconductor Technology International Conference 2015, CSTIC 2015. ed. / Cor Claeys; Qinghuang Lin; David Huang; Hanming Wu; Ru Huang; Kafei Lai; Ying Zhang; Beichao Zhang; Kuochun Wu; Larry Chen; Steve Liang; Peilin Song; Hsiang-Lan Lung; Dong Chen; Qi Wang. Institute of Electrical and Electronics Engineers Inc., 2015. 7153479 (China Semiconductor Technology International Conference 2015, CSTIC 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tanaka, S 2015, Academic approach to new industry-relevant MEMS. in C Claeys, Q Lin, D Huang, H Wu, R Huang, K Lai, Y Zhang, B Zhang, K Wu, L Chen, S Liang, P Song, H-L Lung, D Chen & Q Wang (eds), China Semiconductor Technology International Conference 2015, CSTIC 2015., 7153479, China Semiconductor Technology International Conference 2015, CSTIC 2015, Institute of Electrical and Electronics Engineers Inc., 2015 China Semiconductor Technology International Conference, CSTIC 2015, Shanghai, China, 15/3/15. https://doi.org/10.1109/CSTIC.2015.7153479

Tanaka S. Academic approach to new industry-relevant MEMS. In Claeys C, Lin Q, Huang D, Wu H, Huang R, Lai K, Zhang Y, Zhang B, Wu K, Chen L, Liang S, Song P, Lung H-L, Chen D, Wang Q, editors, China Semiconductor Technology International Conference 2015, CSTIC 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 7153479. (China Semiconductor Technology International Conference 2015, CSTIC 2015). doi: 10.1109/CSTIC.2015.7153479

Tanaka, Shuji. / Academic approach to new industry-relevant MEMS. China Semiconductor Technology International Conference 2015, CSTIC 2015. editor / Cor Claeys ; Qinghuang Lin ; David Huang ; Hanming Wu ; Ru Huang ; Kafei Lai ; Ying Zhang ; Beichao Zhang ; Kuochun Wu ; Larry Chen ; Steve Liang ; Peilin Song ; Hsiang-Lan Lung ; Dong Chen ; Qi Wang. Institute of Electrical and Electronics Engineers Inc., 2015. (China Semiconductor Technology International Conference 2015, CSTIC 2015).

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title = "Academic approach to new industry-relevant MEMS",

abstract = "The paper introduces recent collaboration between Tohoku University and industry in MEMS (micro electro mechanical systems) field. The selected examples of devices are an integrated network tactile sensor for robot applications, a tunable SAW (surface acoustic wave) filter for TV white space cognitive WiFi communication and an anodically-bondable LTCC (low temperature cofired ceramic) wafer for wafer-level hermetic MEMS packaging. In the last part of this paper, multi-leveled shared MEMS facilities available for industrial collaboration are summarized. The most important message here is that we are strongly motivated to contribute to industry in multiple manners.",

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AB - The paper introduces recent collaboration between Tohoku University and industry in MEMS (micro electro mechanical systems) field. The selected examples of devices are an integrated network tactile sensor for robot applications, a tunable SAW (surface acoustic wave) filter for TV white space cognitive WiFi communication and an anodically-bondable LTCC (low temperature cofired ceramic) wafer for wafer-level hermetic MEMS packaging. In the last part of this paper, multi-leveled shared MEMS facilities available for industrial collaboration are summarized. The most important message here is that we are strongly motivated to contribute to industry in multiple manners.

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BT - China Semiconductor Technology International Conference 2015, CSTIC 2015

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A2 - Huang, David

A2 - Wu, Hanming

A2 - Huang, Ru

A2 - Lai, Kafei

A2 - Zhang, Ying

A2 - Zhang, Beichao

A2 - Wu, Kuochun

A2 - Chen, Larry

A2 - Liang, Steve

A2 - Song, Peilin

A2 - Lung, Hsiang-Lan

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Academic approach to new industry-relevant MEMS

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