Ab Initio Study of Divalent 3d Transition Metal Impurities in KMgF 3 and BaLiF3

Takeshi Nishimatsu; Noriaki Terakubo; Hiroshi Mizuseki; Yoshiyuki Kawazoe; Dorota A. Pawlak; Kiyoshi Shimamura; Noboru Ichinose; Tsuguo Fukuda

Ab Initio Study of Divalent 3d Transition Metal Impurities in KMgF ₃ and BaLiF₃

Takeshi Nishimatsu, Noriaki Terakubo, Hiroshi Mizuseki, Yoshiyuki Kawazoe, Dorota A. Pawlak, Kiyoshi Shimamura, Noboru Ichinose, Tsuguo Fukuda

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Divalent 3d transition metal impurities (V, Cr, Mn, Fe, Co, Ni, and Cu) in KMgF₃ and BaLiF₃ have been investigated by local-spin-density approximation (LSDA)-based ab initio calculations using an ultrasoft pseudopotential method and a planewave basis set. The results of numerical calculations show that the 3d transition metal impurities exhibit mid-gap levels and that the electronic transition from impurity levels to the conduction band results from the absorption of vacuum ultraviolet (VUV) light with energy lower than band-gap width. Therefore, 3d transition metal contaminations in KMgF₃ and BaLiF₃ should be avoided for VUV lithographic lens applications.

Original language	English
Pages (from-to)	5082-5085
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	42
Issue number	8
Publication status	Published - 2003 Aug 1

Keywords

Ab initio calculation
Fluoroperovskite
LSDA
Lens
Lithography
Perovskite-like fluoride
Vacuum-ultraviolet-transparent

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Ab Initio Study of Divalent 3d Transition Metal Impurities in KMgF ₃ and BaLiF₃. / Nishimatsu, Takeshi; Terakubo, Noriaki; Mizuseki, Hiroshi; Kawazoe, Yoshiyuki; Pawlak, Dorota A.; Shimamura, Kiyoshi; Ichinose, Noboru; Fukuda, Tsuguo.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 42, No. 8, 01.08.2003, p. 5082-5085.

Research output: Contribution to journal › Article › peer-review

Nishimatsu, Takeshi ; Terakubo, Noriaki ; Mizuseki, Hiroshi ; Kawazoe, Yoshiyuki ; Pawlak, Dorota A. ; Shimamura, Kiyoshi ; Ichinose, Noboru ; Fukuda, Tsuguo. / Ab Initio Study of Divalent 3d Transition Metal Impurities in KMgF ₃ and BaLiF₃. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2003 ; Vol. 42, No. 8. pp. 5082-5085.

@article{61ddda47b66047a491526f99226fc863,

title = "Ab Initio Study of Divalent 3d Transition Metal Impurities in KMgF 3 and BaLiF3",

abstract = "Divalent 3d transition metal impurities (V, Cr, Mn, Fe, Co, Ni, and Cu) in KMgF3 and BaLiF3 have been investigated by local-spin-density approximation (LSDA)-based ab initio calculations using an ultrasoft pseudopotential method and a planewave basis set. The results of numerical calculations show that the 3d transition metal impurities exhibit mid-gap levels and that the electronic transition from impurity levels to the conduction band results from the absorption of vacuum ultraviolet (VUV) light with energy lower than band-gap width. Therefore, 3d transition metal contaminations in KMgF3 and BaLiF3 should be avoided for VUV lithographic lens applications.",

keywords = "Ab initio calculation, Fluoroperovskite, LSDA, Lens, Lithography, Perovskite-like fluoride, Vacuum-ultraviolet-transparent",

author = "Takeshi Nishimatsu and Noriaki Terakubo and Hiroshi Mizuseki and Yoshiyuki Kawazoe and Pawlak, {Dorota A.} and Kiyoshi Shimamura and Noboru Ichinose and Tsuguo Fukuda",

year = "2003",

month = aug,

day = "1",

language = "English",

volume = "42",

pages = "5082--5085",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "8",

}

TY - JOUR

T1 - Ab Initio Study of Divalent 3d Transition Metal Impurities in KMgF 3 and BaLiF3

AU - Nishimatsu, Takeshi

AU - Terakubo, Noriaki

AU - Mizuseki, Hiroshi

AU - Kawazoe, Yoshiyuki

AU - Pawlak, Dorota A.

AU - Shimamura, Kiyoshi

AU - Ichinose, Noboru

AU - Fukuda, Tsuguo

PY - 2003/8/1

Y1 - 2003/8/1

N2 - Divalent 3d transition metal impurities (V, Cr, Mn, Fe, Co, Ni, and Cu) in KMgF3 and BaLiF3 have been investigated by local-spin-density approximation (LSDA)-based ab initio calculations using an ultrasoft pseudopotential method and a planewave basis set. The results of numerical calculations show that the 3d transition metal impurities exhibit mid-gap levels and that the electronic transition from impurity levels to the conduction band results from the absorption of vacuum ultraviolet (VUV) light with energy lower than band-gap width. Therefore, 3d transition metal contaminations in KMgF3 and BaLiF3 should be avoided for VUV lithographic lens applications.

AB - Divalent 3d transition metal impurities (V, Cr, Mn, Fe, Co, Ni, and Cu) in KMgF3 and BaLiF3 have been investigated by local-spin-density approximation (LSDA)-based ab initio calculations using an ultrasoft pseudopotential method and a planewave basis set. The results of numerical calculations show that the 3d transition metal impurities exhibit mid-gap levels and that the electronic transition from impurity levels to the conduction band results from the absorption of vacuum ultraviolet (VUV) light with energy lower than band-gap width. Therefore, 3d transition metal contaminations in KMgF3 and BaLiF3 should be avoided for VUV lithographic lens applications.

KW - Ab initio calculation

KW - Fluoroperovskite

KW - LSDA

KW - Lens

KW - Lithography

KW - Perovskite-like fluoride

KW - Vacuum-ultraviolet-transparent

UR - http://www.scopus.com/inward/record.url?scp=0142012133&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0142012133&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0142012133

VL - 42

SP - 5082

EP - 5085

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 8